University of Minnesota
Institute of Technology
myU OneStop

Steve Campbell 2013

Stephen A. Campbell
Sanford P. and Lenore Edgerton Bordeau Chair


Area of expertise: Micro and Nanofabrication; materials for deeply scaled devices, MEMS and NEMS, semiconductor nanoparticles, nanoparticle devices, quantum dots, QD-LEDs

Ph.D., Physics, 1978, Northwestern University, Evanston, IL, United States
M.S., Physics, 1978, Northwestern University, Evanston, IL, United States
B.A., Physics, 1975, College of St. Thomas, St. Paul, MN, United States

Contact information
Office: PAN 140
Telephone: (612) 625-6608
Personal Web Site

Sanford P. and Lenore Edgerton Bordeau Chair in Electrical and Computer Engineering 2007
Institute of Electrical and Electronic Engineers (IEEE) Fellow 2007
College of Science and Industry (formerly Institute of Technology) Distinguished Professor 2006
George W. Taylor Award for Distinguished Teaching 2005
Presidential Young Investigator

In research, Professor Campbell is most well known for pioneering efforts in high permittivity (aka high-k) materials for the gate insulator in deeply scaled MOSFETs.  This revolution in transistor design has now been adopted by most of the leading edge integrated circuit manufacturers.  His other current interests include ultra high speed MEMS, where he has demonstrated sub-nanosecond mechanical switching, silicon nanoparticle devices where he is building transistors and quantum dot LEDs, and efficient thin film photovoltaics.  In the education area, Professor Campbell leads the University’s participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level.  He has designed and implemented a one-semester capstone experience.  Professor Campbell is the author of The Science and Technology of Microelectronic Fabrication, the most widely used textbook on microfabrication.  After more than a dozen printings, it is now in its third edition.  Professor Campbell’s teaching experience includes Microfabrication, Semiconductor Devices, Electromagnetic Fields, Analog Electronics, Linear Circuits, Circuits Lab, Senior Design, and Materials and Devices.  Professor Campbell serves as the Minnesota lead for the National Nanotechnology Infrastructure Network (NNIN), a network established by NSF to support nanotechnology research.  He directs the University’s NanoFabrication Center ( and is the founding director of the University’s Center for Nanostructure Applications (

Selected publications
"Air-stable full-visible-spectrum emission from silicon nanocrystals synthesized by an all-gas-phase plasma approach", X. D. Pi, R. W. Liptak, J Deneen Nowak, N. P. Wells, C B Carter, S A Campbell and U Kortshagen, Nanotechnology 19 245603 (2008).

"Electroluminescence from Surface Oxidized Silicon Nanoparticles Dispersed Within a Polymer Matrix", Rebekah K. Ligman, Stephen A. Campbell, Lorenzo Mangolini and Uwe Kortshagen Applied Physics Letters 90, 061116 (2007).

"Well-Aligned and Suspended Single-Walled Carbon Nanotube Membranes: Directed Self Assembly, Patterning, and Characterization", Miao Lu, Min-Woo Jang, Greg Haugstad, Stephen A. Campbell, and Tianhong Cui1, submitted to Nanoletters (2008).