The University of Minnesota Center for Micro Electro Mechanical Systems (MEMS) was formed in 1992 through NSF funding to provide multi-disciplinary education and research infrastructure development in MEMS.
The Center supports several instructional courses and a variety of research projects based on MEMS technologies. One of the MEMS emphasis areas at the University of Minnesota is the use of piezoelectric materials for sensors and actuators. A modern 10,000 sq. ft. microelectronics laboratory (the Microtechnology Laboratory, MTL) supports the integration of piezoelectric thin films, micromechanical structures, and MOS integrated circuits.