Department of

Electrical and Computer Engineering

A Department of the Institute of Technology

Faculty Directory

Stephen A. Campbell

Education

Contact Information

Honors/Awards

Synopsis

In research, Professor Campbell is most well known for pioneering efforts in high permittivity (aka high-k) materials for the gate insulator in deeply scaled MOSFETs. This revolution in transistor design has now been adopted by most of the leading edge integrated circuit manufacturers. His other current interests include ultra high speed MEMS, where he has demonstrated sub-nanosecond mechanical switching, silicon nanoparticle devices where he is building transistors and quantum dot LEDs, and efficient thin film photovoltaics. In the education area, Professor Campbell leads the University's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience. Professor Campbell is the author of The Science and Technology of Microelectronic Fabrication, the most widely used textbook on microfabrication. After more than a dozen printings, it is now in its third edition. Professor Campbell's teaching experience includes Microfabrication, Semiconductor Devices, Electromagnetic Fields, Analog Electronics, Linear Circuits, Circuits Lab, Senior Design, and Materials and Devices. Professor Campbell serves as the Minnesota lead for the National Nanotechnology Infrastructure Network (NNIN), a network established by NSF to support nanotechnology research. He directs the University's NanoFabrication Center (www.nfc.umn.edu) and is the founding director of the University's Center for Nanostructure Applications (www.nano.umn.edu).

Selected Publications