"The Science and Engineering of Microelectronic Fabrication",
Stephen A. Campbell
Sole Errata file for the second edition – fourth printing and later
Use as an addition for printings one to three
Last updated 12/27/06
Chapter 3
Page 55, One sentence after Eq. 3.44. The two equations referenced should be 3.44 and 3.42, not 3.45 and 3.43.
Page 61, 5’th paragraph.
(NH4)2H2PO4 should be (NH4)2HPO4
Chapter 7
Page 157, Equation 7.10. 2 pi x L should be 2 pi y L
Chapter 8
Page 185 3’rd paragraph. Acrylic is less than precise. Perhaps a better example would be if the organic ring is attached to every other position on the carbon backbone. The result is styrene.
Page 186 4’th paragraph. A base solution has a pH > 7.
Page 187 Figure 8.6. Wrong position of double band in last step in the lower left figure. The double bond should on the lower right side, not the upper right side, of the right hand carbon ring.
Chapter 9
Page 205, “Recall from Chap. 7 that the Rayleigh limit of resolution is inversely proportional ...”, should read proportional, not inversely proportional
Page 207 Equation 9.4 a=0.9a0/Z1/4 should be 0.9a0*Z1/4
Page 220 Equation 9.16. g should be G
Page 231, Problem 1. deBroglie is misspelled and equation 7.16 should be used, not 7.17
Page 227 Equation 9.18. [CH2- CCH3(COO(CH3))] should be CH2=CCH3(COO(CH3))
Chapter 10
Page 239, vacuum misspelled in Fig. 10.2
Equation 10.10, for one atmosphere of N2, the flux density at room temperature is about 2.9e23 cm^-2 sec-1, not 6e29.
Chapter 11
Page 261, the caption in Fig 11.4 indicates HF and HF03. The latter should be HNO3.
Page 262, The caption for Figure 11.5 is incorrect. H2O2 refers to the left axis, H2SO4 refers to the right axis, and H2O refers to the bottom axis.
Page 264, second paragraph, third line. Delete the word “from”
Page 274, Example 11.2. The solution should refer to Eq 11.11, not 11.10.
Chapter 12
Page 284 Figure 12.2. The vapor pressure curve for Cr is off. As given in the reference, the correct curve is found from the equation: log P(atm) = 6.8 - 20733*T^-1 + 0.4391 log (T) – T*4.094e-4
Page 297 Equations 12.2 through 12.5. M should be m
Page 298 – Example 12.1, The second equation at the top of the page. The denominator of the term at the right is written 2 pi k T subscript m. It should the 2 pi k T m.
Page 308 Last paragraph. 10 keV should be 1 keV
Page 318 “Once again,
nitrogen has the most ……its partial pressure is greater that 10-6 torr.” “that” should be “than”.
Chapter 13
Page 327 – End of the first paragraph “(see Section 9.3)” should be “(see Section 13.3)”.
Page 328 – Sentence after Eq. 13.4. Should read “KP may be greater than or less than one, …”
Page 333 – Example 13.2 The first equation is incorrect. It should be a/25 not a^2/25. In the fourth equation in this example L is taken to be equal to a.
Page 343 - The stress in undoped oxides should be expressed in dyne/cm2, not dyne/cm-2.
p.343. The fourth
paragraph, last sentence “(primarily SiCl2,” the right half of the parenthesises
is missing. It should be after SiCl2.
Page 349 Last paragraph. CF3=CO=CH=CO=CF3 should be CF3-CO-CH-CO-CF3
Chapter 14
Page 357 - The ratio for RCA 1 is given as 5:1:1 NH4OH/H2O2/H2O; water should be the first component that is 5x greater by volume than the other two.
Page 365 Equation 14.9. PHCl2 should be PHCl2
Chapter 15
Page 424 Example 15.1, 2’nd equation. 2.5x10-15 should be 2.5x10-5
Page 444 Figure 16.5 caption. Source/substrate should be well/substrate
Page 446 Figure 16.9 caption is incorrect. No top view is given
Chapter 16
Page 457 Figure 16.18. Ph should be P
Chapter 17
p.473. First
paragraph: “using a liftoff (see Section 11.8) process”, should be “Section
11.9”.
Chapter 19
Page 517 end of the
second paragraph. Although the values
for Poisson’s ratio are true for many materials, particularly those commonly
used for MEMS devices, it is not universally true. The ratio can even be negative. For example, see Lakes, R. S., "Negative Poisson's ratio
materials", Science, 238 551 (1987).
Chapter 20
p. 572 second
paragraph: Sentence should read, “Increasing the silane flow increases the
particle production …”
Other
Page 585 Table 1. The unit for thermal expansion coefficient is K-1
Page 590 Appendix IV, Correct conversion is 4184 J/kcal