EE 5181 - Introduction to Nanotechnology http://www.ece.umn.edu/users/hjacobs/EE5181/ Syllabus
	4.0 cr; Prereq-[3161, 3601, IT grad student] or %; fall, every year NanoScale Imaging;  Patterning using Scanning Probes, Soft-Lithography, Stamping & Moldling; Nanomaterials - Properties, Synthesis, and Applications; NanoManufacturing/Component Integration using Engineered Self-Assembly and Nanotransfer. Labs on AFM, Microcontact Printing, Nanoparticles/Nanowire Synthesis. Instructor: Prof. H. O. Jacobs, hjacobs@umn.edu Office: 5-163 EE/CSci Building, Phone: 612-626-7193 Office Hours: Monday 9 am - 10 am, Wednesday 9 – 10 am

Syllabus (Objectives, Content & Grading)

Class Schedule and Course Material for You to Print

001 LET , 04:40 P.M. - 05:55 P.M. , M,W (09/02/2008 - 12/10/2008) , MechE  108 , TCEASTBANK ,7 4 credits

Dear Students. This schedule will be updated as we go. Please print the electronic handouts during the week of class.

		Topic	Selected Readings/Links
36:	Week 1: Sep  3 L1	Course Orientation & Administrative matters Students Select Partners and Presentation Topics	Homework: - Read the lecture on nanotechnology by R.P. Feynmann, "There's Plenty of Room at the Bottom": http://www.zyvex.com/nanotech/feynman.html - Work on the question sheet (see lecture 1 last pages) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
37:	Week 2: Sep 8 L2/L3	1. Introduction (1 lecture) -History, R.P Feynmann, State of Art, policies, implications for students. 2. NanoScale Imaging (3 lectures) - Electron microscopy; Theory:De Broglie wavel., Auger,X-Ray emiss., EDS spectra.	Homework: - Read Nanotechnology Research Directions, IWGN Workshop Report, eds. M.C. Roco, R.S. Williams and P. Alivisatos, Kluwer Academic Publishers (2000) . - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).  Homework: -Study  http://www.matter.org.uk/tem/sitemap.htm interactive learning tools that relate to engineering, physics, and material science of SEMs and TEMs. - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
38:	Week 3: Sep 15 L4/L5	- Scanning tunneling microscopy; Engineering: feedback; Theory: concept of tunneling, particle in a box, Schrödinger equation, electron density of states. - Atomic force microscopy; Theory: Forces on a nanoscale, force sensitivity, instrument design aspects. Lab Experiment: Force Distance Curves	Homework: - Study  http://hyperphysics.phy-astr.gsu.edu/hbase/quantum/schrcn.html#c1 interactive learning tools on barrier penetration, particle in a box and Schroedinger Equation. - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).  Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
39:	Week 4: Sep 22 L6/L7	3. Traditional Nanotechnology (2 lectures) -  Top Down Lithography, Interference Lithography, Ebeam Lithography, STR Needs & Next Generation Advanced Lithography;Theory: Photon/Electron lith. resolution limit; Lab Experiment: Optical Microscope/Inspection of a CMOS Chip - Material Deposition/Growth Techniques (spin coating, drop coating, evaporation, supersaturation, condensation, CVD, PVD, MBE Crystal Growth, Knudsen Cell, Introduction to Nanomaterials, concept of glow discharge/ plasma); Theory: partial pressure/ volume particle concentration; Theory: Basic gas kinetics -- impingement rate, volume density & mean free path as f(pressure)	Homework: Read the challenge section in Lithography of the INTERNATIONAL TECHNOLOGY ROADMAPFOR SEMICONDUCTORS 2005 EDITION LITHOGRAPHY Litho2005.pdf to find answers to the following questions:nm - What is the expected half pitch limit for projection lithography with 193nm wavelength light? - How is the industry pushing the numerical aperture NA to get to this resolution using a 193 nm light? - What is the expected half pitch when extreme ultra violet lithography will be used? - Work on the question sheets (see last lecture) and turn in your answers beginning of Monday’s class by filling in the answers on the sheets.  Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
40:	Week 5: Sep 29 L8/L9	4. Unconventional Nanotechnology & Nanopatterning (3 lectures) -Scanning Probe Lithography -Nanoimprint, Soft Lithography using elastomers – printing, stamping, molding (Jacobs) Theory: Estimate Collapse Surface Free Energy;                                          Lab Experiment: SAM MicroContact Printing	Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).  Homework: Read the art of building small by Whitesides http://www.ece.umn.edu/users/hjacobs/EE5181/handouts/theartofbuildingsmall.pdf and Soft Lithography http://www.ece.umn.edu/users/hjacobs/EE5181/handouts/solftlithography.pdf and answer the following questions - What is a primary reason why softlithographic tools are being used? - How do you fabricate a mold? < Three sentences - How is a PDMS stamp made?  < Three sentences - Describe key steps to print self-assembled monolayers (SAM) using PDMS stamps? - How do you check if you succeeded in printing the SAM? -You have made an e-beam pattern in PMMA and would like to make a replica of it without going back to the e-beam writer. Read the chapter on solvent assisted micromolding and describe the required steps. The end product you want to get is a new PMMA coated silicon chip that carries the same pattern as your original.
41:	Week 6: Oct 6 L10/L11	-Continue Nanoimprint, Soft Lithography using elastomers – printing, stamping, molding (Jacobs) Lab Experiment: Solvent Assisted Micromodling 5. Nanomaterials: Properties, Synthesis, and Applications (11 lectures) - Nanomaterial Properties (Melting Point, Surface Area, Surface Free Energy, Gibbs Energy, Mechanical Properties, Ultra-Hard)	Homework:http://www.research.ibm.com/journal/rd/455/michel.pdf Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
42:	Week 7: Oct 13 L12/L13	-Optical Properties – Surface Plasmons; Theory: Lorentz Oscillator Model; Mie Theory Reading - Guest Lecture: Professor Sang-Hyun Oh “Nano-photonics Applications”	Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).  Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
43:	Week 8: Oct 20 L14/L15	- OptoElectronic Properties in Metals, Insulators, & Semiconductors; Theory:  Quantum Size Effects - From Molecular Wavefunctions (Homo/Lumo) to Bands in Metals, Semiconductors and Insulators, Orbital Energy Splitting;- When will Quantum Size Effects Occur? Theory: Schrödinger Equation - de Broglie Wavelengths in metals and semiconductors over crystal size - Electronic Properties in Metals & Semiconductors: Surface scattering, Ballistic Conduction, coulomb charging, tunneling, Single Electron Effects, and Coulomb Blockade. Theory: Mean free paths/crystal size (Fermi Speed)	Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
44:	Week 9: Oct27 /Nov	group presentations (Topics 1-5): Each group of max. 3 students review’s a selected area and proposes a new research activity in a 20 minute talk and one page report that will be graded	Homework (Very important) -- Read Chapter 2 and Chapter 3 of Cao’s book. In the coming weeks we will have a number of guest lectures.  The material is assigned to EEs and MEs as homework this week and others without materials and chemistry background. Try to understand some of the concepts (not all but at least some -- two hours this week and two hours next week should be enough). The outcome will be that you will better understand some of the basics of nanomaterial synthesis. Moreover, it will help you collaborate with chemists or chemical engineers if you ever were to be engaged in a cross disciplinary project involving new materials with improved electronic or mechanical properties. This is also the preparation that you need to understand the lab experiment next week.
45: H	Week 10: Nov 3 L16/L17	- Guest Lecture: Professor Ruden: “Organic Electronics and Transport in Organic thin film devices and Applications” Organic semiconductors  properties, recent progress and applications, TFTs, circuits, RFID tags, electronic paper, organic LEDs, and displays.	Homework: Learn the basics about nanowire synthesis and applications and read Chapter 4 of Cao’s book.  Homework: Prepare for the Lab experiment where you synthesize Au nanoparticles to make a chemical sensor.                             Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
		-Nanomaterial Synthesis Routes (Ch 2-3 of Cao’s book) Lab Experiment/Print Manual: Nanomaterials Lab and Sensor
46:	Week 11: Nov 10 L18/L19	- Integration of Nanoparticles using Directed Self-assembly. (Jacobs) -Introduction and Motivation (Jacobs); Combining Top-Down Patterning with Bottom-Up Self-Assembly (Jacobs); Overview of forces/interactions at different scales (Jacobs, Israelachvili book.  Ch. 2-6)	Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
47:	Week 12: Nov 17 L20/L21	- Guest Lecture Prof. Kortshagen: Gas Phase Nanoparticle Synthesis - Guest Lecture Prof. Campbell: Nanoparticle Applications and Nanoparticle Electronics	Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
48:	Week 13: Nov 24 L22 Jacobs at MRS	6. Nanomanufacturing: Heterogeneous Integration and Assembly (~3 lectures) - Guest Lecture Prof. Stadler: Nanowire Synthesis and Nanowire Application: metallic and semiconducting nanotubes FET transistors and their demonstrated performance, potential applications of nanotubes in IC intereconnects, circuits, LEDs and field emission displays. Nanowires and single electron transistors, crossbar switches and applications to computing, Sensors, Field emission, Thermoelectric devices. -Self-assembly across lengths scales and material boundaries (Jacobs)	Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
49:	Week 14: Dec 1 L24	-Nanotransfer across lengths scales and material boundaries (Jacobs)	Homework: Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
		group presentations (Topics 6-8): Each group of max. 3 students review’s a selected area and proposes a new research activity in a 20 minute talk and one page report that will be graded.
50:	Week 15: Dec 8 last lecture / finals	group presentations (Topics 6-8): Each group of max. 3 students review’s a selected area and proposes a new research activity in a 20 minute talk and one page report that will be graded	Click on this Link for information on the Final and a collection of the homework problems. The questions form the basis for the exam. Note that I added and removed a few questions (<5). Understanding how to get the answers is the best way to prepare for the exam.
51:	Week 16: Dec 15	Comprehensive final exam Monday December 15^th.

EE 5181 - Introduction to Nanotechnology Syllabus http://www.ece.umn.edu/users/hjacobs/EE5181/
	4.0 cr; Prereq-[3161, 3601, IT grad student] or %; fall, every year NanoScale Imaging;  Patterning using Scanning Probes, Soft-Lithography, Stamping & Moldling; Nanomaterials - Properties, Synthesis, and Applications; NanoManufacturing/Component Integration using Engineered Self-Assembly and Nanotransfer. Labs on AFM, Microcontact Printing, Nanoparticles/Nanowire Synthesis. Instructor: Prof. H. O. Jacobs, hjacobs@umn.edu Office: 5-163 EE/CSci Building, Phone: 612-626-7193 Office Hours: Monday 9 am - 10 am, Wednesday 9 – 10 am

Class size: The class size is limited to 25 students due to the LAB experiments that complement the lectures.

Class Location: The class meets Mondays and Wednesdays 4:40-5:55 pm. Room MechE  108

Objectives:

• The objective of this course is to introduce some of the fundamentals and current state-of-the-art in Nanotechnology through lectures from the instructor, selected readings, experiments, and special topic presentations from the students. The topics that will be covered include: Conventional and Advance Lithography, Scanning Probes, Nanomaterials Properties, Nanomaterial Synthesis, Nanomaterial Electronics, Bottom-up/Top-Down Nanomaterial Integration and Assembly.
• While this course provides an overview of a broad range of topics it will discuss theoretical aspects tailored to benefit EE and ME students that may have limited knowledge in material science/chemistry. 
• The students are provided cross-disciplinary scientific knowledge and professional skills that are key to strive in high-tech companies, emerging science based industries, government laboratories, and academia. 

Course content: 

1. Introduction - History, R. P. Feynmann (~2 lectures)

• Logistics, R. P. Feynmann, There’s plenty of room at the bottom and others (Famous Talk)
• History, Definitions, Economics, Implications for Students, Nanotech Policies.

2. NanoScale Imaging  (SEM, STM, AFM)  (3 lectures)

• Electron microscopy
• Scanning tunneling microscopy
• Atomic force microscopy

SEM Theory: De Broglie wavelength, Auger emission, X-Ray emission, EDS spectra.  

STM Engineering: concept of feedback

STM Theory: concept of tunneling, particle in a box, Schrödinger equation, electron density of states.

AFM Theory: Forces on a nanoscale, force sensitivity, instrument design aspects.

Lab Experiment: Force Distance Curves

3. Traditional Nanotechnology (~2 lectures)

• Top Down Lithography, Interference Lithography, Ebeam Lithography, STR Needs & Next Generation Advanced Lithography

Theory: Photon/Electron lith. resolution limit

Experiment: Optical Microscope/Inspection of a CMOS Chip

• Material Deposition/Growth Techniques (spin coating, drop coating, evaporation, supersaturation, condensation, CVD, PVD, MBE Crystal Growth, Knudsen Cell, Introduction to Nanomaterials, concept of glow discharge/ plasma)

Theory: partial pressure/ volume particle concentration

Theory: Basic gas kinetics -- impingement rate, volume density & mean free path as a function of pressure

Theory: Equilibrium vapor pressure & evaporation rates.

4. Unconventional Nanotechnology & Nanopatterning (~2 lectures)

• Scanning Probe Lithography

Knowledge: Basic Functions, Oxidation, Charge and Surface Potential, Double Layers and more

• Nanoimprint, Soft Lithography using Elastomers – printing, stamping, molding

Theory: Estimate Collapse due to Surface Free Energy

Experiment: MicroContact Printing of Self-Assembled Monolayers

5. Nanomaterials: Properties, Synthesis, and Applications (~11 lectures)

• Nanomaterial Properties (Melting Point, Surface Area, Surface Free Energy, Gibbs Energy, Mechanical Properties, Ultra-Hard)
• Optical Properties – Surface Plasmons and Quantum Size Effects

Theory: Lorentz Oscillator Model,

 Particle in a Box.

• Nanophotonics Applications, Guest Lecture: Professor Sang-Hyun Oh
• Electronic Properties in Metals & Semiconductors - Surface scattering, Ballistic Conduction

Theory: Mean free paths/crystal size (Fermi Speed)

• Organic Electronics and Transport in Organic thin film devices and Applications (Guest Lecture: Prof. Ruden)