EE 5181 - Introduction to Nanotechnology

http://www.ece.umn.edu/users/hjacobs/EE5181/
Syllabus

 

ECE Home Page

4.0 cr; Prereq-[3161, 3601, IT grad student]; fall, every year
NanoScale Imaging;  Patterning using Scanning Probes, Soft-Lithography, Stamping & Moldling; Nanomaterials - Properties, Synthesis, and Applications; NanoManufacturing/Component Integration using Engineered Self-Assembly and Nanotransfer. Labs on AFM, Microcontact Printing, Nanoparticles/Nanowire Synthesis.

Instructor: Prof. H. O. Jacobs, hjacobs@umn.edu
Office: 5-163 Keller Hall, Phone: 612-626-7193
Office Hours: Monday 9 am - 10 am, Wednesday 9 am - 10 am

ECE Home Page

 

Syllabus (Objectives, Content & Grading)

Class Schedule and Course Material for You to Print

04:00 P.M. - 05:15 P.M.,M,W (09/07/2010 - 12/15/2010), KHKH 3-125, TCEASTBANK , 4 credits


Dear Students. This schedule will be updated as we go. Please print the electronic handouts during the week of class.

 

 

Topic

Selected Readings/Links

36:

Week 1: Sep 8

 

L1 Wed

-Course Orientation & Administrative mattersThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Students Select Partners and Presentation TopicsThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Homework:

-        Read the lecture on nanotechnology by R.P. Feynmann, "There's Plenty of Room at the Bottom:" http://www.zyvex.com/nanotech/feynman.html

-        Work on the question sheet (see lecture 1 last pages) and turn in your answers beginning of  Monday’s class (print and add your answers to the questions sheets). 

37:

Week 2: Sep 13

 

L2/L3

1. Introduction (1 lecture)

-History, R.P Feynmann, State of Art, policies, implications for studentsThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. 

 

 

2. NanoScale Imaging (3 lectures)

-Electron microscopy 

  Theory: De Broglie wavel., Auger,X-Ray emiss., EDS spectraThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. 

Homework:

-        Read Nanotechnology Research Directions, IWGN Workshop Report, eds. M.C. Roco, R.S. Williams and P. Alivisatos, Kluwer Academic Publishers (2000) The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors..

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

 

Homework:

-        Study http://www.matter.org.uk/tem/sitemap.htm interactive learning tools that relate to engineering, physics, and material science of SEMs and TEMs.

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

38:

Week 3: Sep 20

 

L4/L5

-Scanning tunneling microscopy

  ~Engineering: feedback

  ~Theory: concept of tunneling, particle in a box, Schrödinger equation, electron density of statesThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

-Atomic force microscopy

  ~Theory: Forces on a nanoscale, force sensitivity, instrument design aspectsThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Lab Experiment: Nanoscale imaging- Scanning Probe and Optical Microscopyword.jpg

    

Homework:

-        Study  http://hyperphysics.phy-astr.gsu.edu/hbase/quantum/schrcn.html#c1 interactive learning tools on barrier penetration, particle in a box and Schroedinger Equation.

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). 

 

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

39:

Week 4: Sep 27

 

L6/L7

3. Traditional Nanotechnology (2 lectures)

-Top Down Lithography, Interference Lithography, Ebeam Lithography, STR Needs & Next Generation Advanced Lithography
  ~Theory: Photon/Electron lith. resolution limit
The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.



-Material Deposition/Growth Techniques (spin coating, drop coating, evaporation, supersaturation, condensation, CVD, PVD, MBE Crystal Growth, Knudsen Cell, Introduction to Nanomaterials, concept of glow discharge/ plasma)
  ~Theory: partial pressure/ volume particle concentration
  ~Theory: Basic gas kinetics -- impingement rate, volume density & mean free path as f(pressure)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Lab Experiment: Evaporation and Lift-off experimentword.jpg

 

Homework:

-        Read the challenge section in Lithography of the INTERNATIONAL TECHNOLOGY ROADMAPFOR SEMICONDUCTORS 2005 EDITION LITHOGRAPHY Litho2005.pdfThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. to find answers to the following questions:

~    What is the expected half pitch limit for projection lithography with 193nm wavelength light?

~    How is the industry pushing the numerical aperture NA to get to this resolution using a 193 nm light?

~    What is the expected half pitch when extreme ultra violet lithography will be used?

~    Work on the question sheets (see last lecture) and turn in your answers beginning of Monday’s class by filling in the answers on the sheets. 

40:

Week 5: Oct 4

 

L8/L9

4. Unconventional Nanotechnology & Nanopatterning (3 lectures)

-Scanning Probe LithographyThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

 


-Nanoimprint, Soft Lithography using elastomers – printing, stamping, molding (Jacobs)

  ~Theory: Estimate Collapse Surface Free EnergyThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. 

Lab Experiment: Nanoimprinting & PDMS stamp castingword.jpg

 

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). 

 

Homework:

-      Read the art of building small by Whitesides

http://www.ece.umn.edu/users/hjacobs/EE5181/handouts/theartofbuildingsmall.pdfThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. and Soft Lithography http://www.ece.umn.edu/users/hjacobs/EE5181/handouts/solftlithography.pdfThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. and answer the following questions:

~   What is a primary reason why soft lithographic tools are being used?

~    How do you fabricate a mold? < Three sentences

~    How is a PDMS stamp made?  < Three sentences

~   Describe key steps to print self-assembled monolayers (SAM) using PDMS stamps?

~   How do you check if you succeeded in printing the SAM?

~   You have made an e-beam pattern in PMMA and would like to make a replica of it without going back to the e-beam writer. Read the chapter on solvent assisted micromolding and describe the required steps. The end product you want to get is a new PMMA coated silicon chip that carries the same pattern as your original.

41:

Week 6: Oct 11

 

L10

-Continue Nanoimprint, Soft Lithography using elastomers – printing, stamping, molding (Jacobs)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Homework:

-       Read Printing Meets Lithography: Soft Approaches to High-Resolution PatterningThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

-       Work on the question sheet (see last lecture) and prepare for the Midterm.

- Midterm (Oct. 13)

42:

 

Week 7: Oct 18

 

L11/L12

5. Nanomaterials: Properties, Synthesis, and Applications (11 lectures)

 

-Nanomaterial Properties (Melting Point, Surface Area, Surface Free Energy, Gibbs Energy, Mechanical Properties, Ultra-Hard)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

-Optical Properties – Surface Plasmons

  ~Theory: Lorentz Oscillator Model; Mie Theory ReadingThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Lab Experiment: Phase-shift and stamping soft lithographyword.jpg

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

43:

Week 8: Oct 25

 

L13

-Guest Lecture: Professor Sang-Hyun Oh Nano-plasmonics Applications"The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

 

-OptoElectronic Properties in Metals, Insulators, & Semiconductors

  ~Theory:  Quantum Size Effects - From Molecular Wavefunctions (HOMO/LUMO) to Bands in Metals, Semiconductors and Insulators, Orbital Energy Splitting; When will Quantum Size Effects Occur

  ~Theory: Schrödinger Equation - de Broglie Wavelengths in metals and semiconductors over crystal sizeThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

44:

Week 9:

Nov 1

 

L15

 

-Electronic Properties in Metals & Semiconductors: Surface scattering, Ballistic Conduction, Single Electron Effects, and Coulomb Blockade

  ~Theory: Mean free paths/crystal size (Fermi Speed)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Homework:

-        (Very important) -- Read Chapter 2The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. and Chapter 3The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. of Cao’s book. In the coming weeks we will have a number of guest lectures.  The material is assigned to EEs and MEs as homework this week and others without materials and chemistry background. Try to understand some of the concepts (not all but at least some -- two hours this week and two hours next week should be enough). The outcome will be that you will better understand some of the basics of nanomaterial synthesis. Moreover, it will help you collaborate with chemists or chemical engineers if you ever were to be engaged in a cross disciplinary project involving new materials with improved electronic or mechanical properties. This is also the preparation that you need to understand the lab experiment next week.

Group Presentations (Topics 1-5): Each group of at most 2 students reviews a selected area and proposes a new research activity in a 20 minute talk and two page report that will be graded

 

45:

 

Week 10: Nov 8

 

L17

-Guest Lecture: Professor Frisbie: “Organic Electronics and Transport in Organic thin film devices and Applications” Organic semiconductors  properties, recent progress and applications, TFTs, circuits, RFID tags, electronic paper, organic LEDs, and displaysThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Homework:

-        Learn the basics about nanowire synthesis and applications and read Chapter 4The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. of Cao’s book. 

Homework:

-        Prepare for the Lab experiment where you synthesize Au nanoparticles to make a chemical sensor.

                        

Homework:

-         Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

-Nanomaterial Synthesis Routes (Ch 2-3 of Cao’s book)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Lab Experiment: Nanomaterials Lab and SensorThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

46:

 

Week 11: Nov 15

 

L20/L21

-Integration of Nanoparticles using Directed Self-assembly (Jacobs) The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors. 

 

-Introduction and Motivation (Jacobs); Combining Top-Down Patterning with Bottom-Up Self-Assembly (Jacobs); Overview of forces/interactions at different scales (Jacobs, Israelachvili book.  Ch. 2-6)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

Homework:

-       Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

47:

 

Week 12: Nov 22

6. Nanomanufacturing: Heterogeneous Integration and Assembly (~3 lectures)

 

-Self-assembly across lengths scales and material boundaries (Jacobs)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

-Nanotransfer across lengths scales and material boundaries (Jacobs)The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). 

48:

 

Week 13: Nov 29

 

L22/23

 

Jacobs at MRS

Lab Experiment: Scanning Electron Microscope/ CharfacThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

 

 

- Micro/NanofluidicsThe image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

 

49:

 

Week 14:

Dec 6

Group Presentations (Topics 6-8): Each group of at most 2 students reviews a selected area and proposes a new research activity in a 20 minute talk and two page report that will be graded

Homework:

-        Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).

Group Presentations (Topics 6-8): Each group of at most 2 students reviews a selected area and proposes a new research activity in a 20 minute talk and two page report that will be graded

50:

 

Week 15:

Dec 13

Comprehensive final exam: Wednesday December 15th

Click on this Link for information on the Final and a collection of the homework problems. The questions form the basis for the exam. Note that I added and removed a few questions (<5). Understanding how to get the answers is the best way to prepare for the exam.The image “http://www.ece.umn.edu/users/hjacobs/HOJ_Pub_files/image004.jpg” cannot be displayed, because it contains errors.  

 

 

EE 5181 - Introduction to Nanotechnology

Syllabus
http://www.ece.umn.edu/users/hjacobs/EE5181/

ECE Home Page

4.0 cr; Prereq-[3161, 3601, IT grad student]; fall, every year
NanoScale Imaging;  Patterning using Scanning Probes, Soft-Lithography, Stamping & Moldling; Nanomaterials - Properties, Synthesis, and Applications; NanoManufacturing/Component Integration using Engineered Self-Assembly and Nanotransfer. Labs on AFM, Microcontact Printing, Nanoparticles/Nanowire Synthesis.

Instructor: Prof. H. O. Jacobs, hjacobs@umn.edu
Office: 5-163 Keller Hall, Phone: 612-626-7193
Office Hours: Monday 9 am - 10 am, Wednesday 9 - 10 am

ECE Home Page

 

Class size: The class size is limited to 25 students due to the LAB experiments that complement the lectures.

Class Location: The class meets Mondays and Wednesdays 4:00-5:15 pm in Keller Hall Room 3-125.

 

Objectives:

  • The objective of this course is to introduce some of the fundamentals and current state-of-the-art in Nanotechnology through lectures from the instructor, selected readings, experiments, and special topic presentations from the students. The topics that will be covered include: Conventional and Advance Lithography, Scanning Probes, Nanomaterials Properties, Nanomaterial Synthesis, Nanomaterial Electronics, Bottom-up/Top-Down Nanomaterial Integration and Assembly.
  • While this course provides an overview of a broad range of topics it will discuss theoretical aspects tailored to benefit EE and ME students that may have limited knowledge in material science/chemistry. 
  • The students are provided cross-disciplinary scientific knowledge and professional skills that are key to strive in high-tech companies, emerging science based industries, government laboratories, and academia. 

 

Course content: 

 

1. Introduction - History, R. P. Feynmann (~2 lectures)

  • Logistics, R. P. Feynmann, There’s plenty of room at the bottom and others (Famous Talk)
  • History, Definitions, Economics, Implications for Students, Nanotech Policies.

 

2. NanoScale Imaging  (SEM, STM, AFM)  (3 lectures)

  • Electron microscopy
  • Scanning tunneling microscopy
  • Atomic force microscopy

SEM Theory: De Broglie wavelength, Auger emission, X-Ray emission, EDS spectra.  

STM Engineering: concept of feedback

STM Theory: concept of tunneling, particle in a box, Schrödinger equation, electron density of states.

AFM Theory: Forces on a nanoscale, force sensitivity, instrument design aspects.

Lab Experiment: Force Distance Curves

3. Traditional Nanotechnology (~2 lectures)

  • Top Down Lithography, Interference Lithography, Ebeam Lithography, STR Needs & Next Generation Advanced Lithography

                                                                      Theory: Photon/Electron lith. resolution limit

Experiment: Nanoscale imaging: Scanning Probe and Optical Microscopy

  • Material Deposition/Growth Techniques (spin coating, drop coating, evaporation, supersaturation, condensation, CVD, PVD, MBE Crystal Growth, Knudsen Cell, Introduction to Nanomaterials, concept of glow discharge/ plasma)

                                                                      Theory: partial pressure/ volume particle concentration

Theory: Basic gas kinetics -- impingement rate, volume density & mean free path as a function of pressure

Theory: Equilibrium vapor pressure & evaporation rate

Experiment: Metal evaporation and liftoff

 

 

4. Unconventional Nanotechnology & Nanopatterning (~2 lectures)

  • Scanning Probe Lithography

Knowledge: Basic Functions, Oxidation, Charge and Surface Potential, Double Layers and more

  • Nanoimprint, Soft Lithography using Elastomers – printing, stamping, molding

Theory: Estimate Collapse due to Surface Free Energy

Experiment: MicroContact Printing of Self-Assembled Monolayers

 

5. Nanomaterials: Properties, Synthesis, and Applications (~11 lectures)

  • Nanomaterial Properties (Melting Point, Surface Area, Surface Free Energy, Gibbs Energy, Mechanical Properties, Ultra-Hard)
  • Optical Properties – Surface Plasmons and Quantum Size Effects

Theory: Lorentz Oscillator Model,

 Particle in a Box.

  • Nanophotonics Applications, Guest Lecture
  • Electronic Properties in Metals & Semiconductors - Surface scattering, Ballistic Conduction

Theory: Mean free paths/crystal size (Fermi Speed)

  • Organic Electronics and Transport in Organic thin film devices and Applications Guest Lecture
  • Nanomaterial Synthesis Routes (Ch. 8,9, Cao; Ch. 12, Ozin)
  • Synthesis of Nanoparticles (Ch. 3, Cao; Ch. 6, Ozin)                                                                                                  Experiment: Making Nanoparticles.
  • Gas Phase Synthesis of Nanoparticles, Guest Lecture
  • Nanoparticle electronics,
  • Synthesis of Nanowires (Ch. 4, Cao; Ch. 5, Ozin)
  • Nanowire Synthesis and Nanowire Application

Metallic and semiconducting nanotubes FET transistors and their demonstrated performance, potential applications of nanotubes in IC intereconnects, circuits, LEDs and field emission displays. Nanowires and single electron transistors, crossbar switches  and  applications to computing, Sensors, Field emission, Thermoelectric devices.

6. Nanosystems manufacturing: Heterogeneous Integration and Self-Assembly (~3 lectures)

  • Introduction and Motivation (Jacobs)
  • Overview of the forces and interactions at the different scales (Jacobs, Israelachvili.  Ch. 2-6)
  • Combining Top-Down Patterning with Bottom-Up Self-Assembly (Jacobs).
  • Nanotransfer across lengths scales and material boundaries (Jacobs)
  • Self-assembly across lengths scales and material boundaries (Jacobs)

 

Grading:

  • 10 points for class participation and homework. You can get 10 points in 2.5 point increments. The grading key is as follows 10p outstanding throughout the semester, 7.5 p very good, 5 p average, 2.5 p little, 0 p no participation.
  • 30 points for a special topic student presentation and report on a selected topic.  You will prepare a special topic student presentation (20 points) and report describing a new/original idea that you develop (10 points). Details: Students form a group (group size <= 2) during the first lecture and sign up for a topic of choice. They review the selected area and propose a new research activity in a 20 minute long talk. Together with the talk you provide a 2 page long report to pitch the idea. Originality, ability to present the idea, and ability to provide scientific sound answers to questions are learning goals. The topics are as follows: (1) NanoScale Imaging, (2) Conventional Nanoscale Lithography/Patterning, (3) Unconventional Nanoscale Lithography/Patterning, (4) Novel Nanomaterials Sythesis, (5) Nanomaterials Application, (6) Nanoelectronics, (7) Nanosystems and Heterogeneous Integration, (8) own topic in the field of Nanotechnology.
  • 20 points Midterm (closed notes and books, one hand-written, single side, 8.5x11 crib sheet is allowed).
  • 40 points Comprehensive Final Exam (closed notes and books, one hand-written, single side, 8.5x11 crib sheet is allowed).
  • Exam Absences: No written make-up exams will be given. Missing the final is permitted only for the most compelling reasons. Except in extraordinary situations, you should obtain permission from the professor to miss an exam in advance; otherwise you will be awarded a 0. A missed final with a valid excuse (i.e. note from a doctor, police officer, or judge) will be replaced by a prorated share of the other grades you have received and in some case by an oral exam. My recommendation is not to miss an exam.

 

Academic dishonesty: Please refer to the Student Judicial Affairs web pages http://www.sja.umn.edu/

  

 General interest texts:

Handbook of nanoscience Engineering and Technology, Edited by William A. Goddard, III.., CRS press, 2003.

G. Cao, Nanostructures & Nanomaterials: Synthesis, Properties & Applications

G. Ozin, A Arsenault, Nanochemistry: A Chemical Approach to Nanomaterials

A. Steckl, AParticle beam fabrication and in-situ processing of Integrated Circuits,@ Proc. IEEE (1986)

Scientific American, Understanding Nanotechnology

Ed Regis, Nano: The Emerging Science of Nanotechnology

Timp, ed., Nanotechnology

C. Marrian, Editor, Special Issue Nanometer-Scale S&T, Proc. IEEE. (April 1997)

A. T. Hubbard, ed, The Handbook of Surface Imaging and Visualization. CRC press (1995)
Our Molecular Future: How Nanotechnology, Robotics, Genetics and Artificial Intelligence Will Transform the World, Prometheus (2002), ISBN 1573929921