Euisik Yoon
Associate Professor

B.S.,
1982,
M.S.,
1984,
Ph.D.,
1990
Telephone:
(612) 625-1574
E-mail: yoon@umn.edu
Web Page: http://iml.umn.edu
Research
Direction
My research interests are in
integrated MEMS (Micro-Electro-Mechanical-Systems) and VSLI circuit/system
design. Currently, I have two major efforts in research activities:
bio-interface system and CMOS imaging system. The mission of this research
group is to realize self-contained microsystems that
will combine/process natural signals (such as bio, chemical, optical and
thermal signals) as well as electrical signals on a single chip platform by
integrating new MEMS/nano structures with low-power
VLSI circuits and systems.

My research direction and goals can be summarized
with a picture as follows:

Disposable Microsystem-on-a-Chip
Biography
Euisik Yoon received the B.S. and
M.S. degrees in electronics engineering from Seoul
National University in 1982 and 1984, respectively, and Ph.D. degree
in electrical engineering from the
University of Michigan,
Dr. Yoon was the co-recipient of the Student Paper Award at the
IEEE International Microwave Symposium in 1999 and 2000, respectively,
concerning the topics on MEMS inductors and RF MEMS switch work. He served in
various Technical Program Committees including Microprocesses
and Nanotechnology Conference, International Sensor Conference and IEEE AP ASIC
Conference. Currently, he is serving in IEEE ISSCC program committee and IEEE
MEMS conference technical program committee.
Invited
Talks
1.
E. Yoon, ¡°Disposable Microsystem-on-Chip: platform for integrating BioMEMS and
Wireless Communicator,¡±
2.
E. Yoon, ¡°Disposable Microsystem-on-Chip for Cellular Manipulation,¡± Fourth
International Symposium on Microchemistry and Microsystems (ISMM 2004),
3.
4.
E. Yoon, ¡°A Disposable Biochip for
Single-Cell Manipulation,¡± International Symposium on the Prospect and
Application of Intelligent Human and Bio-Sensing, October 2004 (invited).
5.
E. Yoon, ¡°A Disposable Microchip
for Bio and Robotics Application,¡± 1st UNSW-KAIST International
Joint Seminar on ICT & Control Applications in Health Care,¡± Sydney,
Australia, August 2004 (invited).
6.
E. Yoon, ¡°Integrated RF MEMS for Wireless Communications,¡±
Asia-Pacific Conference of Transducers and Micro-Nano
Technology,
7.
E. Yoon, panel session speaker
¡°Will Micromachining ever make it into RF/Microwave Silicon Volume
Manufacturing?¡± IEEE International Microwave Symposium/RFIC, June 2004
(invited).
8.
E. Yoon, ¡°A Disposable Biochip for
Single Cell Analysis,¡± International Workshop on Nanoscale
Semiconductor Devices, May 2004 (invited).
9.
E. Yoon, ¡°A Disposable Micro/Naofluidic Chip for Bio-Interface,¡± 2th
KAIST International Symposium on Frontier Issues in Nano-Bio-Information
Technologies, Oct., 2003 (invited).
10.E. Yoon, ¡°A Disposable Microfluidic Chip with Surface Modification for Cell
Monitoring,¡± 5th KAIST-UCSB Workshop on Soft Matter and Biological
Self-Assembling Nano-Materials, Sep., 2003 (invited).
11.E. Yoon, ¡°A Disposable Microfluidic System for Cell Monitoring and Nanoliter Drug Injection,¡± Korea-Japan International
Symposium of Micro/Nano Mechatronics
Technology, May 2003 (Invited).
12.E. Yoon, ¡°Disposable Microfluidic Chips for Bio-Interface,¡± Protein Chip and
Bio-Nanointerface Symposium, April 2003 (Invited).
13.E. Yoon et al., ¡°A Disposable Microsystem-on-a-chip for Nanoscale Bio/Chemical Analysis,¡± Korea Conference on
Innovative Science and Technology: Nanotechnology – Future Implication, Nov.,
2002. (Invited).
14.E. Yoon, ¡°Scaling Issues in Disposable Microfluidic Systems,¡± The 3rd
Korea-UK High Technology Industry Forum,¡± Oct., 2002 (Invited).
15.E. Yoon, ¡°A Disposable Microfluidic Chip for Nanoliter
Drug Injection,¡± International Symposium for Microchemical
System Technology: Microfluidics, Microreactors,
and BioMEMS, Oct., 2002 (Invited).
16.E. Yoon, ¡°Integrated RF MEMS for Wireless Communications,¡± The 8th
KIEE MEMS Symposium, Aug., 2002. (Invited).
17.E. Yoon, ¡°A Disposable BioChip for DNA Sample
Preparation,¡± Symposium on Micro/Bio Visualization, Apr., 2002 (Invited).
18.E. Yoon, ¡°A Disposable Passive Microfluidic Chip for DNA Extraction and
Purification,¡± The 1st International Symposium on Ultramicrochemical Processes, Feb., 2002 (Invited).
Recent
Publications
1.
I.-J. Cho, T. Song, S.-H. Baek,
and E. Yoon, ¡°A Low-Voltage and
Low-Power RF MEMS Series and Shunt Switches Actuated by Combination of
Electromagnetic and Electrostatic Forces,¡± IEEE Trans. Microwave Theory Tech. (accepted for publication)
2.
Kwang-Seok Yun, Segyeong
Joo, Hong-Jeong Kim, Juhyoun Kwak, and Euisik Yoon,
"Silicon
Micromachined Infrared Thin-Layer Cell for In Situ Spectroelectrochemical
Analysis of Aqueous and Nonaqueous Solvent System," Electroanalysis, Volume 17, Issue 11, pp.959-964, June
2005.
3.
Sang-Wook Han, Seong-Jin
Kim and Euisik Yoon, "A Low Dark
Current CMOS Image Sensor Pixel with a Photodiode Structure Enclosed by P-well,"
Journal of Semiconductor Technology and Science, Vol.5, No.2, pp.11-15, June.
2005.
4.
Sang-Wook Han and Euisik Yoon, "An
Area-Efficient Correlated Double Sampling Circuit with Single Sampling
Capacitor for CMOS Image Sensors," Proceedings of International
Technical Conference on Circuits/Systems, Computers and Communications
(ITC-CSCC) 2005, vol.3, pp.1063-1064,
5.
Maesoon Im, Il-Joo Cho, Kwang-Seok Yun, and Euisik Yoon, "An
Electromagnetically-Actuated Polymer Micro-Pen for Picoliter Biological Assay
Patterning," 13th International Conference on Solid-State
Sensors and Actuators (Transducers¡¯05), Digest of Technical Papers pp.1588-1591
Seoul, Korea, 5-9 June, 2005.
6.
Sun-Il Chang, Hyung-Kew Lee and Euisik Yoon,
"Flip-Chip
Assembly on Soft Polymer Substrate Using ACP for Integrating Readout Circuitry
for Modular Expandable Tactile Sensor Array," 13th
International Conference on Solid-State Sensors and Actuators (Transducers¡¯05),
Digest of Technical Papers pp.1969-1972 Seoul, Korea, 5-9 June, 2005.
7.
S.-J. Kim, K.-H. Lee, S.-W. Han, and
8.
H.-K. Lee, S.-I. Chang, K.-H. Kim, S.-J. Kim, K.-S. Yun,
and
9.
B.-G. Kim, K.-S. Yun, and E. Yoon, "Active Positioning
Control of Single Cell/Microbead in a Micro-Well
Array Chip by Dielectrophoresis," IEEE International MEMS Conference, pp.
702-705, January 2005.
10.
I.-J. Cho, T. Song, S.-H. Baek,
and E. Yoon, "A Low-Voltage
Push-Pull SPDT RF MEMS Switch Operated by Combination of Electromagnetic
Actuation and Electrostatic Hold," IEEE International MEMS Conference, pp.
32-35, January 2005.
11.
K.-S. Yun and
12.
H.-J. Kim, K.-S. Yun, E. Yoon, and J. Kwak, "A Direct Analysis
of Nanomolar Metal Ions in Environmental Water Samples with Nafion Coated
Microelectrodes," Electrochimica Acta, Vol.50, No.1, pp.205-210, Nov. 2004.
13.
H.-K. Lee, K.-S. Kim, and E.
Yoon, "A Wide-Range
Linearly Tunable Optical Filter Using Lorentz Force," IEEE
Photonics Technology Letters, Vol.16, No.9, pp.2087-2089, Sep. 2004.
14.
K.-S. Yun, J. Gil, J. Kim, H.-J. Kim, K.-H.
Kim, D. Park, J. Y. Kwak, H. Shin, K. Lee, J. Kwak, and E. Yoon,
¡°A Miniaturized Low-Power Wireless Remote Environmental Monitoring System Based
on Electrochemical Analysis,¡± Sensors and Actuators B: Chemical, Vol.102, No.1,
pp.27-34, Sep., 2004.
15.
K.-S. Yun, D. Lee, M. S. Kim, H.-S. Kim, G.
M. Lee, and E. Yoon, "High-Throughput
Bio-Molecule Detection Using Microbead-Based Assay with Quantum Dot
Fluorescence in a Microfluidic Chip," Proceedings of
International Conference on Miniaturized Systems for Chemistry and Life
Sciences (micro TAS'04), pp.222-224, Malmo, Sweden,
26-30 September, 2004.
16.
H.-J. Kim, K.-S. Yun, E. Yoon, and J. Kwak, "A direct
Analysis of Heavy Metal Ions in Environmental Water Samples with Nafion coated Microelectrodes," Asianalysis
VII, Hong Kong Baptist University, Hong Kong, 28-31 July. 2004. F034-P.
17.
T. Song, S. Ko,
D.-H. Cho, H.-S. Oh, C. Chung, and E. Yoon, "A 5GHz
Transformer-Coupled VCO Using Bias-Level Shifting Technique,"
Digest of Papers, pp.127-130, IEEE Radio Frequency Integrated Circuits (RFIC) Sympoium, Texas, 6-8 June, 2004.
18.
K.-H. Lee and E. Yoon, ¡°A
CMOS Image Sensor with Reset Level Control Using Dynamic Reset Current Source
for Noise Suppression,¡±, IEEE ISSCC Digest of Technical Papers, San Francisco,
USA, pp. 114-115, Feb., 2004.
19.
E.-C. Park and E. Yoon, ¡°A
13GHz CMOS Distributed Oscillator Using MEMS Coupled Transmission Lines for Low
Phase Noise,¡± IEEE ISSCC Digest of Technical Papers, San Francisco, USA, pp.
300-301, Feb., 2004.
20.
K.-S. Yun and
21.
22.
H.-K. Lee, K.-S. Kim, I.-J. Cho and E. Yoon, ¡°A Wide Range
Linearly-Tunable Optical Filter Using Magnetic Actuation,¡± IEEE International MEMS
conference, pp. 93-96, Jan., 2004.
23.
D. Baek, T. Song, E. Yoon, and S. Hong, ¡°8 GHz CMOS Quadrature
VCO Using Trasnformer-Based LC Tank,¡° IEEE Mircrowave and Wireless Components Letters, Vol. 13, No.
18, pp. 446-448, Oct., 2003.
24.
K.-S. Yun and E. Yoon, ¡°A Micro/Nano-Fluidic Chip-Based
Micro-Well Array for High-Throughput Cell Analysis and Drug Screening,¡± Micro
TAS Symposium (micro TAS¡¯03), pp. 861-864, California, USA, October, 2003.
25.
B.-G. Kim, J.-H. Kim, and E.
Yoon, ¡°Formation of 3-Dimensional Microfluidic Components Using Double-Side
Exposed Thick Photoresist Molds,¡± Micro TAS Symposium
(micro TAS¡¯03), pp. 627-630, California, USA, October, 2003.
26.
M. K. Jeon, J.-H. Kim, J. Noh, S.I. Woo, E. Yoon, and H. G. Park, ¡°Design of a
Recycle-Micromixer,¡± Micro TAS Symposium (micro TAS¡¯03),
pp. 109-112, California, USA, October, 2003.
27.
I.-J. Cho and
28.
D. H. Lee, D.-E. Park, E. Yoon, and S.
Kwon, ¡°A MEMS
Piston-cylinder Device Actuated by Combustion,¡° Journal of Heat Transfer, pp.
487-493, vol. 125, no.3, June, 2003.
29.
K.-S. Yun, J. Gil, J. Kim, H.-J. Kim, K.-H.
Kim, D. Park, J. Y. Kwak, H. Shin, K. Lee, J. Kwak, and E. Yoon,
¡°A
Miniaturized Low-Power Wireless Remote Environmental Monitoring System Using
Microfabricated Electrochemical Sensing Electrodes,¡± 12th
International Conference on Solid-State Sensors and Actuators (Transducers¡¯03),
Boston Massachusetts, USA, June, 2003.
30.
D. Baek, T. Song, S. Ko,
E. Yoon and S. Hong, "Ananlysis on Resonator Coupling and its application to CMOS
Quadrature VDO at 8GHz," IEEE Radio Frequency
Integrated Circuits(RFIC) Symposium, Philadelphia, PA, June 8-10, 2003.
31.
32.
H. K. Lee, S. Y. Myong,
K. S. Lim, and E. Yoon, ¡°Electrical Properties of Photo-CVD Boron-Doped
Hydrogenated Nanocrystalline Silicon Carbide (p-nc-SiC:H) Films for Uncooled IR Bolometer Applications,¡± Journal of
Non-Crystalline Solids, Vol. 316, pp 297 - 301, 2003.
33.
34.
J-B Yoon, B-I Kim, Y-S Choi, and E.
Yoon, ¡°3-D Construction of Monolithic Passive Components for RF and
Microwave IC¡¯s Using Thick-Metal Surface Micromachining Technology,¡± IEEE
Trans. Microwave Theory Tech.
(Special Issues on RF MEMS), Vol. 51, No.1, pp. 279-288, January 2003.
35.
36.
J.-H. Kim, H.-K. Lee, B.-I. Kim, J.-W. Jeon,
J.-B. Yoon and E. Yoon, "A High
Fill-Factor Micro-Mirror Stacked on a Crossbar Torsion Spring for
Electrostatically-Actuated Two-Axis Operation in Large-Scale Optical Switch
Array," IEEE International MEMS conference 2003, pp. 259-262,
Kyoto, Japan.
37.
K.-S. Yun, S.-I.
Lee, G.-M. Lee, and E. Yoon, ¡°Design and Fabrication of Micro/Nano-Fluidic Chip Performing Single-Cell Positioning and Nanoliter Drug Injection for Single-Cell Analysis,¡± Proceedings of the Micro
Total Analysis System (mTAS) 2002 Symposium, Nara, Japan, pp. 652-654, Nov., 2002.
38.
J.-H. Kim, B.-G. Kim, M. La, J.-B. Yoon, and E.
Yoon, ¡°A Disposable Passive Microfluidic System Integrated with Micromixer and DNA Purification Chip for DNA Sample
Preparation,¡± Proceedings
of the Micro Total Analysis System (mTAS) 2002 Symposium, Nara, Japan, pp.224-226,
Nov., 2002.
39.
40.
K.-N. Han, S.-W. Han and
41.
K.-N. Han, S.-W. Han and
42.
J-B Yoon, Y-S Choi, B-I Kim, Y. Eo, and E. Yoon, ¡°CMOS-Compatible, Surface Micromachined,
Suspended Spiral Inductors for Multi-GHz Silicon RF IC¡¯s,¡± IEEE Electron Device Letters, vol.
23, pp. 591-593, Oct. 2002.
43.
K.-S. Yun, I.-J. Cho,
J.-U. Bu, C.-J. (CJ) Kim and
44.
45. J.-H. Kim, B.-G. Kim, J.-B.
Yoon,
46. Dae-Hoon Lee, Dae-Eun
Park, Joon-Bo Yoon, Sejin
Kwon, and Euisik Yoon,
"Fabrication and Test of a MEMS Combustor and Reciprocating Device",
Journal of Microengineering and Micromachanic, Vol.
12, p.26-34, 2002.
47. K. Lee and E. Yoon, "A 500dpi Capactive Fingerprint Sensor with Pixel-level Adaptive
Image Enhancement", IEEE ISSCC Digest of Technical Papers, San Francisco,
USA, pp. 352-353, Feb., 2002.
48. J-W Jeon,
B-I Kim, J.-H Kim, H-K Lee, J-B Yoon, E.
Yoon, and K.S. Lim, "Electrostatic Digital Micromirror
Using Interdigitated Cantilevers", IEEE MEMS
2002 Conference, Las Vegas, USA, pp. 528-531, Jan., 2002.
49. J-B Yoon, B-I Kim, Y-S Choi,
and E. Yoon, "3-D Lithography
and Metal Surface Micromachining for RF and Microwave MEMS", IEEE MEMS
2002 Conference, Las Vegas, USA, pp. 673-676, Jan., 2002.
50.
51. J.-H. Kim, B.-G. Kim, H.
Nam, D.-E. Park, K.-S. Yun, J.-B. Yoon, J. You and E. Yoon, "A Disposable DNA Sample
Preparation Microfluidic Chip for Nucleic Acid Probe Assay", IEEE
International MEMS Conference 2002, Las Vegas, USA, pp. 133-136, Jan., 2002.
52. I.–J. Cho,
K.-S. Yun, H.-K. Lee, J.-B. Yoon and E. Yoon, "A Low Voltage Two- Axis
Electromagnetically Actuated Micromirror with Bulk
Silicon Mirror Plates and Torsion Bars", IEEE MEMS 2002 Conference, Las
Vegas, USA, pp. 540-543, Jan., 2002.
53. Y.-S. Choi, J.-B. Yoon, B.-I.
Kim, and E. Yoon, "A
High-Performance MEMS Transformer for Silicon RF ICs", IEEE International
MEMS 2002 Conference, Las Vegas, USA, pp. 653-656, Jan., 2002.
54. H.-J. Kim, K.-S. Yun, S. Joo, E. Yoon, and J. Kwak, "An Infrared
Thin-Layer Spectroelectrochemical Cell with Silicon
Micromachining Technique", Analytical Sciences, Vol. 17 Supplement, pp.
a81-a83, 2001.
55. S-W Yoon, E-C Park, C-H Lee,
S. Sim, S-G Lee, E.
Yoon, J. Laskar, S. Hong, ¡°5~6 GHz-Band GaAs MESFET-Based Cross-Coupled Differential Oscillator MMICs with Low Phase-Noise Performance,¡± IEEE Microwave and
Wireless Components Letters, Vol. 11, No. 12, pp. 495-497, Dec., 2001.
56. J.–H. Kim, B.-G. Kim, J.-B.
Yoon and E. Yoon, "A
Photosensitive Glass Chip for DNA Purification of Nucleic Acid Probe Assay,¡±
Journal of Semiconductor Technology and Science, Vol. 1, No. 4, pp. 103-109,
Dec., 2001.
57. K-H. Lee, H.-K. Lee, H.-J. Byun, I.-J. Cho, J. Bu, and E.Yoon, "An
audio frequency filter application of micromachined
thermally-isolated diaphragm, structures", Sensors, and Actuators - A -
Physical Sensors, Vol. A89, pp. 49-55, 2001.
58. H.-J. Kim, K.-S. Yun, S. Joo, E. Yoon, and J. Kwak, "An Infrared
Thin-Layer Spectroelectrochemical Cell with Silicon
Micromachining Technique" The Sixth Asian Conference on Analytical
Sciences.
59. Y.-S. Choi, J.-B. Yoon,
B.-I. Kim, E. Yoon, and C.-H. Han,
"Fabrication of a Solenoid-Type Microwave Transformer". The 11th
International Conference on Solid-State Sensors and Actuators,
60. J.-H. Kim, B.-G. Kim, D.-E.
Park, K.-S. Yun, J.-B. Yoon and E. Yoon, "A Disposable DNA Purification Chip on Photosensitive
Glass Substrate," International Sensor Conference 2001,
61. B.-G. Kim, J.-H. Kim, J.-B.
Yoon and E. Yoon , "A Passive
Micro Mixer in a Two- Way Separated Three-Dimensional Microchannel
Formed by Using Polydimethylsiloxane (PDMS) "
Proceedings of the International Sensor Conference 2001, Seoul, Korea, pp.
157-158, Oct., 2001.
62. K.-S. Yun,
H.-J. Kim, S. Joo, J. Kwak
and E. Yoon, "In situ FTIR
Monitoring of Electrochemical Reactions Using a Silicon Micromachined Infrared Thin-layer Cell"
International Sensor Conference 2001, Seoul, Korea, pp. 163-164, Oct., 2001.
63. J.-H. Kim, B.-G. Kim, E. Yoon and C.-H. Han, "A New
Monolithic Micro Biosensor for Blood Analysis". IEEE International MEMS
Conference 2001,
64. K.-S. Yun,
I.-J. Cho, J.-U. Bu, G.-H. Kim, Y.-S. Jeon, C.-J. (CJ) Kim, and E. Yoon, "A Micropump Driven by
Continuous Electrowetting Actuation for Low Voltage
and Low Power Operations", IEEE International MEMS 2001 Conference,
Interlaken, Switzerland, pp.487-490, Jan., 2001.
Patents
1.
I.-J. Cho, K.-S. Yun,
E. Yoon, "Electromagnetically
Actuated Micromirror Actuator and Fabrication Method
Thereof", KAIST,
2.
E. Yoon, J.-B. Yoon, H.-K. Lee,
J.-H. Kim, "Micromirror Actuator", KAIST,
3.
E. Yoon and K.-S. Yun, ¡°Micropump Driven by
Movement of Liquid Drop Induced by Continuous Electrowetting,¡±
KAIST,
4.
5.
J.-B. Yoon, C.-H. Han, E. Yoon,
C.-H. Kim,"Method for manufaturing
a semiconductor device having a metal layer floating over a substrate",
KAIST, U.S. Patent #6518165, 2003
6.
E. Yoon, K.-H. Lee,
and H.-K. Lee, ¡°Electrothermal Integrator and Audio
Frequency Filter,¡± KAIST,
7.
E. Yoon, E.-C. Park,
and J.-B. Yoon, ¡°Sealed-type Remote Pressure-Monitoring Device Method for
Fabricating the Same,¡± KAIST, U.S. Patent #6,287,256,
2001.
8.
N. Yeung, E. Pak, C.-C. Chao,
and E. Yoon, "Apparatus and
Method for Determining the Speed of a Semiconductor Chip,¡± Silicon Graphics
Inc.
9.
E. Yoon, R. P. Kovacs, and M. E.
Thomas "Method of Providing A Dielectric Structure Semiconductor Devices,¡± National
Semiconductor Corporation,
10.E. Yoon, R. Kovacs, and R. Allison
"Photolithography Control System and Method Using Latent Image
Measurements,¡± National Semiconductor Corporation," U.S. Patent
#5,338,630, 1994.
11.E. Yoon, A. Bergemont,
and R. Kovacs "Advanced Self-Aligned Stacked Gate EPROM Cells Using
Tantalum Oxide Control Gate Dielectric,¡± National Semiconductor Corporation,
12.E. Yoon, R. Kovacs, and R. Allison
"Phase Contrast Latent Image Metrology Microlithography,¡± National
Semiconductor Corporation,