Euisik Yoon

Associate Professor

 

 

 

B.S., 1982, Seoul National University, Seoul, Korea

M.S., 1984, Seoul National University, Seoul, Korea

Ph.D., 1990 University of Michigan, Ann Arbor, MI




Telephone: (612) 625-1574

E-mail: yoon@umn.edu

Web Page: http://iml.umn.edu

 

 

 

Research Direction

My research interests are in integrated MEMS (Micro-Electro-Mechanical-Systems) and VSLI circuit/system design. Currently, I have two major efforts in research activities: bio-interface system and CMOS imaging system. The mission of this research group is to realize self-contained microsystems that will combine/process natural signals (such as bio, chemical, optical and thermal signals) as well as electrical signals on a single chip platform by integrating new MEMS/nano structures with low-power VLSI circuits and systems.

 

 

 

 

 

 

 

 

 

 

 


My research direction and goals can be summarized with a picture as follows:

 

Disposable Microsystem-on-a-Chip

Biography

Euisik Yoon received the B.S. and M.S. degrees in electronics engineering from Seoul National University in 1982 and 1984, respectively, and Ph.D. degree in electrical engineering from the University of Michigan, Ann Arbor, in 1990. From 1990 to 1994 he was with the Fairchild Research Center of National Semiconductor Corp., Santa Clara, CA, where he was engaged in researches on deep submicron CMOS integration and advanced gate dielectrics. From 1994 to 1996 he was a Member of Technical Staff at Silicon Graphics Inc., Mountain View, CA, working on the design of the MIPS microprocessor R4300i and the RCP 3-D graphic coprocessor. From 1996 to 2005, he was with the Department of Electrical Engineering at Korea Advanced Institute of Science and Technology (KAIST), Daejon, Korea. In 2005, he joined the Department of Electrical Computer Engineering at the University of Minnesota, Minneapolis, MN. His present research interests are in BioMEMS, integrated CMOS sensors and microsystems, and VLSI circuit design.
   Dr. Yoon was the co-recipient of the Student Paper Award at the IEEE International Microwave Symposium in 1999 and 2000, respectively, concerning the topics on MEMS inductors and RF MEMS switch work. He served in various Technical Program Committees including Microprocesses and Nanotechnology Conference, International Sensor Conference and IEEE AP ASIC Conference. Currently, he is serving in IEEE ISSCC program committee and IEEE MEMS conference technical program committee.

 

Invited Talks

1.    E. Yoon, ¡°Disposable Microsystem-on-Chip: platform for integrating BioMEMS and Wireless Communicator,¡± Harvard University, EE Seminar, February, 2005 (Invited).

2.    E. Yoon, ¡°Disposable Microsystem-on-Chip for Cellular Manipulation,¡± Fourth International Symposium on Microchemistry and Microsystems (ISMM 2004), Takamatsu, Japan, November 2004 (Keynote Lecture).

3.    E. Yoon, ¡°Scaling in Nanofluidics for Disposable Bio-Microsystem,¡± The 2nd International Symposium on Nanomanufacturing, Novemver 2004 (invited).

4.    E. Yoon, ¡°A Disposable Biochip for Single-Cell Manipulation,¡± International Symposium on the Prospect and Application of Intelligent Human and Bio-Sensing, October 2004 (invited).

5.    E. Yoon, ¡°A Disposable Microchip for Bio and Robotics Application,¡± 1st UNSW-KAIST International Joint Seminar on ICT & Control Applications in Health Care,¡± Sydney, Australia, August 2004 (invited).

6.    E. Yoon, ¡°Integrated RF MEMS for Wireless Communications,¡± Asia-Pacific Conference of Transducers and Micro-Nano Technology, Sapporo, Japan, June 2004 (invited).

7.    E. Yoon, panel session speaker ¡°Will Micromachining ever make it into RF/Microwave Silicon Volume Manufacturing?¡± IEEE International Microwave Symposium/RFIC, June 2004 (invited).

8.    E. Yoon, ¡°A Disposable Biochip for Single Cell Analysis,¡± International Workshop on Nanoscale Semiconductor Devices, May 2004 (invited).

9.    E. Yoon, ¡°A Disposable Micro/Naofluidic Chip for Bio-Interface,¡± 2th KAIST International Symposium on Frontier Issues in Nano-Bio-Information Technologies, Oct., 2003 (invited).

10.E. Yoon, ¡°A Disposable Microfluidic Chip with Surface Modification for Cell Monitoring,¡± 5th KAIST-UCSB Workshop on Soft Matter and Biological Self-Assembling Nano-Materials, Sep., 2003 (invited).

11.E. Yoon, ¡°A Disposable Microfluidic System for Cell Monitoring and Nanoliter Drug Injection,¡± Korea-Japan International Symposium of Micro/Nano Mechatronics Technology, May 2003 (Invited).

12.E. Yoon, ¡°Disposable Microfluidic Chips for Bio-Interface,¡± Protein Chip and Bio-Nanointerface Symposium, April 2003 (Invited).

13.E. Yoon et al., ¡°A Disposable Microsystem-on-a-chip for Nanoscale Bio/Chemical Analysis,¡± Korea Conference on Innovative Science and Technology: Nanotechnology – Future Implication, Nov., 2002. (Invited).

14.E. Yoon, ¡°Scaling Issues in Disposable Microfluidic Systems,¡± The 3rd Korea-UK High Technology Industry Forum,¡± Oct., 2002 (Invited).

15.E. Yoon, ¡°A Disposable Microfluidic Chip for Nanoliter Drug Injection,¡± International Symposium for Microchemical System Technology: Microfluidics, Microreactors, and BioMEMS, Oct., 2002 (Invited).

16.E. Yoon, ¡°Integrated RF MEMS for Wireless Communications,¡± The 8th KIEE MEMS Symposium, Aug., 2002. (Invited).

17.E. Yoon, ¡°A Disposable BioChip for DNA Sample Preparation,¡± Symposium on Micro/Bio Visualization, Apr., 2002 (Invited).

18.E. Yoon, ¡°A Disposable Passive Microfluidic Chip for DNA Extraction and Purification,¡± The 1st International Symposium on Ultramicrochemical Processes, Feb., 2002 (Invited).

 

Recent Publications

1. I.-J. Cho, T. Song, S.-H. Baek, and E. Yoon, ¡°A Low-Voltage and Low-Power RF MEMS Series and Shunt Switches Actuated by Combination of Electromagnetic and Electrostatic Forces,¡± IEEE Trans. Microwave Theory Tech. (accepted for publication)

2. Kwang-Seok Yun, Segyeong Joo, Hong-Jeong Kim, Juhyoun Kwak, and Euisik Yoon, "Silicon Micromachined Infrared Thin-Layer Cell for In Situ Spectroelectrochemical Analysis of Aqueous and Nonaqueous Solvent System," Electroanalysis, Volume 17, Issue 11, pp.959-964, June 2005.

3. Sang-Wook Han, Seong-Jin Kim and Euisik Yoon, "A Low Dark Current CMOS Image Sensor Pixel with a Photodiode Structure Enclosed by P-well," Journal of Semiconductor Technology and Science, Vol.5, No.2, pp.11-15, June. 2005.

4. Sang-Wook Han and Euisik Yoon, "An Area-Efficient Correlated Double Sampling Circuit with Single Sampling Capacitor for CMOS Image Sensors," Proceedings of International Technical Conference on Circuits/Systems, Computers and Communications (ITC-CSCC) 2005, vol.3, pp.1063-1064, Cheju, Korea, June 2005

5. Maesoon Im, Il-Joo Cho, Kwang-Seok Yun, and Euisik Yoon, "An Electromagnetically-Actuated Polymer Micro-Pen for Picoliter Biological Assay Patterning," 13th International Conference on Solid-State Sensors and Actuators (Transducers¡¯05), Digest of Technical Papers pp.1588-1591 Seoul, Korea, 5-9 June, 2005.

6. Sun-Il Chang, Hyung-Kew Lee and Euisik Yoon, "Flip-Chip Assembly on Soft Polymer Substrate Using ACP for Integrating Readout Circuitry for Modular Expandable Tactile Sensor Array," 13th International Conference on Solid-State Sensors and Actuators (Transducers¡¯05), Digest of Technical Papers pp.1969-1972 Seoul, Korea, 5-9 June, 2005.

7. S.-J. Kim, K.-H. Lee, S.-W. Han, and E. Yoon, "A 200¡¿160 Pixel CMOS Fingerprint Recognition SoC with Adaptable Column-Parallel Processors," IEEE International Solid-State Circuits Conference (ISSCC), pp. 250-251, February 2005.

8. H.-K. Lee, S.-I. Chang, K.-H. Kim, S.-J. Kim, K.-S. Yun, and E. Yoon, "A modular expandable tactile sensor using flexible polymer," IEEE International MEMS Conference, pp. 642-645, January 2005

9. B.-G. Kim, K.-S. Yun, and E. Yoon, "Active Positioning Control of Single Cell/Microbead in a Micro-Well Array Chip by Dielectrophoresis," IEEE International MEMS Conference, pp. 702-705, January 2005.

10.  I.-J. Cho, T. Song, S.-H. Baek, and E. Yoon, "A Low-Voltage Push-Pull SPDT RF MEMS Switch Operated by Combination of Electromagnetic Actuation and Electrostatic Hold," IEEE International MEMS Conference, pp. 32-35, January 2005.

11.  K.-S. Yun and E. Yoon, "Micro/Nanofluidic Device for Single-Cell-Based Assay," Biomedical Microdevices, 2004. (accepted)

12.  H.-J. Kim, K.-S. Yun, E. Yoon, and J. Kwak, "A Direct Analysis of Nanomolar Metal Ions in Environmental Water Samples with Nafion Coated Microelectrodes," Electrochimica Acta, Vol.50, No.1, pp.205-210, Nov. 2004.

13.  H.-K. Lee, K.-S. Kim, and E. Yoon, "A Wide-Range Linearly Tunable Optical Filter Using Lorentz Force," IEEE Photonics Technology Letters, Vol.16, No.9, pp.2087-2089, Sep. 2004.

14.  K.-S. Yun, J. Gil, J. Kim, H.-J. Kim, K.-H. Kim, D. Park, J. Y. Kwak, H. Shin, K. Lee, J. Kwak, and E. Yoon, ¡°A Miniaturized Low-Power Wireless Remote Environmental Monitoring System Based on Electrochemical Analysis,¡± Sensors and Actuators B: Chemical, Vol.102, No.1, pp.27-34, Sep., 2004.

15.  K.-S. Yun, D. Lee, M. S. Kim, H.-S. Kim, G. M. Lee, and E. Yoon, "High-Throughput Bio-Molecule Detection Using Microbead-Based Assay with Quantum Dot Fluorescence in a Microfluidic Chip," Proceedings of International Conference on Miniaturized Systems for Chemistry and Life Sciences (micro TAS'04), pp.222-224, Malmo, Sweden, 26-30 September, 2004.

16.  H.-J. Kim, K.-S. Yun, E. Yoon, and J. Kwak, "A direct Analysis of Heavy Metal Ions in Environmental Water Samples with Nafion coated Microelectrodes," Asianalysis VII, Hong Kong Baptist University, Hong Kong, 28-31 July. 2004. F034-P.

17.  T. Song, S. Ko, D.-H. Cho, H.-S. Oh, C. Chung, and E. Yoon, "A 5GHz Transformer-Coupled VCO Using Bias-Level Shifting Technique," Digest of Papers, pp.127-130, IEEE Radio Frequency Integrated Circuits (RFIC) Sympoium, Texas, 6-8 June, 2004.

18.  K.-H. Lee and E. Yoon, ¡°A CMOS Image Sensor with Reset Level Control Using Dynamic Reset Current Source for Noise Suppression,¡±, IEEE ISSCC Digest of Technical Papers, San Francisco, USA, pp. 114-115, Feb., 2004.

19.  E.-C. Park and E. Yoon, ¡°A 13GHz CMOS Distributed Oscillator Using MEMS Coupled Transmission Lines for Low Phase Noise,¡± IEEE ISSCC Digest of Technical Papers, San Francisco, USA, pp. 300-301, Feb., 2004.

20.  K.-S. Yun and E. Yoon, ¡°Microfabrication of 3-Dimensional Photoresist Structures Using Selective Patterning and Development on Two Types of Specific Resists and Its Application to Microfluidic Components,¡± IEEE International MEMS conference, pp. 757-760, Jan., 2004.

21.  E.-C. Park, T.-S. Song, S.-H. Baek and E. Yoon, ¡°Low Phase Noise CMOS Distributed Oscillators Using Low Loss MEMS Transmission Lines,¡± IEEE International MEMS conference, pp. 645-648, Jan., 2004.

22.  H.-K. Lee, K.-S. Kim, I.-J. Cho and E. Yoon, ¡°A Wide Range Linearly-Tunable Optical Filter Using Magnetic Actuation,¡± IEEE International MEMS conference, pp. 93-96, Jan., 2004.

23.  D. Baek, T. Song, E. Yoon, and S. Hong, ¡°8 GHz CMOS Quadrature VCO Using Trasnformer-Based LC Tank,¡° IEEE Mircrowave and Wireless Components Letters, Vol. 13, No. 18, pp. 446-448, Oct., 2003.

24.  K.-S. Yun and E. Yoon, ¡°A Micro/Nano-Fluidic Chip-Based Micro-Well Array for High-Throughput Cell Analysis and Drug Screening,¡± Micro TAS Symposium (micro TAS¡¯03), pp. 861-864, California, USA, October, 2003.

25.  B.-G. Kim, J.-H. Kim, and E. Yoon, ¡°Formation of 3-Dimensional Microfluidic Components Using Double-Side Exposed Thick Photoresist Molds,¡± Micro TAS Symposium (micro TAS¡¯03), pp. 627-630, California, USA, October, 2003.

26.  M. K. Jeon, J.-H. Kim, J. Noh, S.I. Woo, E. Yoon, and H. G. Park, ¡°Design of a Recycle-Micromixer,¡± Micro TAS Symposium (micro TAS¡¯03), pp. 109-112, California, USA, October, 2003.

27.  I.-J. Cho and E. Yoon, "A Low-Voltage Three-Axis Electromagnetically Actuated Micromirror for High Coupling Efficiency," IEEE International Conference on Optical MEMS 2003, Hawaii, USA

28.  D. H. Lee, D.-E. Park, E. Yoon, and S. Kwon, ¡°A MEMS Piston-cylinder Device Actuated by Combustion,¡° Journal of Heat Transfer, pp. 487-493, vol. 125, no.3, June, 2003.

29.  K.-S. Yun, J. Gil, J. Kim, H.-J. Kim, K.-H. Kim, D. Park, J. Y. Kwak, H. Shin, K. Lee, J. Kwak, and E. Yoon, ¡°A Miniaturized Low-Power Wireless Remote Environmental Monitoring System Using Microfabricated Electrochemical Sensing Electrodes,¡± 12th International Conference on Solid-State Sensors and Actuators (Transducers¡¯03), Boston Massachusetts, USA, June, 2003.

30.  D. Baek, T. Song, S. Ko, E. Yoon and S. Hong, "Ananlysis on Resonator Coupling and its application to CMOS Quadrature VDO at 8GHz," IEEE Radio Frequency Integrated Circuits(RFIC) Symposium, Philadelphia, PA, June 8-10, 2003.

31.  E.-C. Park, S.-H. Baek, T. Song, J.-B. Yoon, and E. Yoon, "Performance Comparison of 5GHz VCOs Integrated by CMOS Compatible High Q MEMS Inductors," IEEE International Microwave Symposium, 2003, Philadelphia, USA.

32.  H. K. Lee, S. Y. Myong, K. S. Lim, and E. Yoon, ¡°Electrical Properties of Photo-CVD Boron-Doped Hydrogenated Nanocrystalline Silicon Carbide (p-nc-SiC:H) Films for Uncooled IR Bolometer Applications,¡± Journal of Non-Crystalline Solids, Vol. 316, pp 297 - 301, 2003.

33.  E.-C. Park, Y.-S. Choi, J.-B. Yoon, S. Hong, and E. Yoon, ¡°Fully-Integrated Low Phase Noise VCOs with On-Chip MEMS Inductors,¡± IEEE Trans. Microwave Theory Tech. (Special Issues on RF MEMS), Vol. 51, No.1, pp. 289-296, January 2003.

34.  J-B Yoon, B-I Kim, Y-S Choi, and E. Yoon, ¡°3-D Construction of Monolithic Passive Components for RF and Microwave IC¡¯s Using Thick-Metal Surface Micromachining Technology,¡± IEEE Trans. Microwave Theory Tech. (Special Issues on RF MEMS), Vol. 51, No.1, pp. 279-288, January 2003.

35.  E.-C. Park, Y.-S. Choi, B.-I. Kim, J.-B. Yoon and E. Yoon, "A Low Loss MEMS Transmission Line with Shielded Ground," IEEE International MEMS conference 2003, pp. 136-139, Kyoto, Japan.

36.  J.-H. Kim, H.-K. Lee, B.-I. Kim, J.-W. Jeon, J.-B. Yoon and E. Yoon, "A High Fill-Factor Micro-Mirror Stacked on a Crossbar Torsion Spring for Electrostatically-Actuated Two-Axis Operation in Large-Scale Optical Switch Array," IEEE International MEMS conference 2003, pp. 259-262, Kyoto, Japan.

37.  K.-S. Yun, S.-I. Lee, G.-M. Lee, and E. Yoon, ¡°Design and Fabrication of Micro/Nano-Fluidic Chip Performing Single-Cell Positioning and Nanoliter Drug Injection for Single-Cell Analysis,¡± Proceedings of the Micro Total Analysis System (mTAS) 2002 Symposium, Nara, Japan, pp. 652-654, Nov., 2002.

38.  J.-H. Kim, B.-G. Kim, M. La, J.-B. Yoon, and E. Yoon, ¡°A Disposable Passive Microfluidic System Integrated with Micromixer and DNA Purification Chip for DNA Sample Preparation,¡± Proceedings of the Micro Total Analysis System (mTAS) 2002 Symposium, Nara, Japan, pp.224-226, Nov., 2002.

39.  E.-C. Park, J.-B. Yoon, S. Hong, and E. Yoon, ¡°A 2.6GHz Low Phase-Noise VCO Monolithically Integrated with High Q MEMS Inductors,¡± European Solid-State Circuits Conference, Florence, Italy, Sept., 2002, pp. 143-146.

40.  K.-N. Han, S.-W. Han and E. Yoon, ¡°Fast Floating-Point Normalisation Unit Realised Using NOR Planes,¡± Electronics Letters, Vol. 38, No. 16, August 2002.

41.  K.-N. Han, S.-W. Han and E. Yoon, ¡°A New Floating-Point Normalization Scheme by Bit Parallel Operation of Leading One Position Value,¡± Proceedings of the 3rd IEEE AP-ASIC 2002.

42.  J-B Yoon, Y-S Choi, B-I Kim, Y. Eo, and E. Yoon, ¡°CMOS-Compatible, Surface Micromachined, Suspended Spiral Inductors for Multi-GHz Silicon RF IC¡¯s,¡± IEEE Electron Device Letters, vol. 23, pp. 591-593, Oct. 2002.

43.  K.-S. Yun, I.-J. Cho, J.-U. Bu, C.-J. (CJ) Kim and E. Yoon, ¡°A Surface-Tension Driven Micropump for Low Voltage and Low Power Operations,¡± IEEE Journal of MEMS, Vol. 11, No. 5, pp. 454-461, Oct, 2002.

44.  E.-C. Park, Y.-S. Choi, J.-B. Yoon, and E. Yoon, ¡°Monolithically Integrable RF MEMS Passives,¡± Journal of Semiconductor Technology and Science, Vol. 2, No. 1, pp. 49-55, March 2002.

45.  J.-H. Kim, B.-G. Kim, J.-B. Yoon, E. Yoon, Chul-Hi Han, "A New Monolithic Microbiosensor for Whole Blood Analysis,¡± Sensors and Actuators - A - Physical Sensor, Vol. 95, pp. 108-113, 2002.

46.  Dae-Hoon Lee, Dae-Eun Park, Joon-Bo Yoon, Sejin Kwon, and Euisik Yoon, "Fabrication and Test of a MEMS Combustor and Reciprocating Device", Journal of Microengineering and Micromachanic, Vol. 12, p.26-34, 2002.

47.  K. Lee and E. Yoon, "A 500dpi Capactive Fingerprint Sensor with Pixel-level Adaptive Image Enhancement", IEEE ISSCC Digest of Technical Papers, San Francisco, USA, pp. 352-353, Feb., 2002.

48.  J-W Jeon, B-I Kim, J.-H Kim, H-K Lee, J-B Yoon, E. Yoon, and K.S. Lim, "Electrostatic Digital Micromirror Using Interdigitated Cantilevers", IEEE MEMS 2002 Conference, Las Vegas, USA, pp. 528-531, Jan., 2002.

49.  J-B Yoon, B-I Kim, Y-S Choi, and E. Yoon, "3-D Lithography and Metal Surface Micromachining for RF and Microwave MEMS", IEEE MEMS 2002 Conference, Las Vegas, USA, pp. 673-676, Jan., 2002.

50.  D.-E. Park, D.-H. Lee, J.-B. Yoon, S. Kwon, and E. Yoon, "Design and Fabrication of Micromachined Internal Combustion Engine as a Power Source for Microsystems", IEEE MEMS 2002 Conference, Las Vegas, USA, pp. 272-275, Jan., 2002.

51.  J.-H. Kim, B.-G. Kim, H. Nam, D.-E. Park, K.-S. Yun, J.-B. Yoon, J. You and E. Yoon, "A Disposable DNA Sample Preparation Microfluidic Chip for Nucleic Acid Probe Assay", IEEE International MEMS Conference 2002, Las Vegas, USA, pp. 133-136, Jan., 2002.

52.  I.–J. Cho, K.-S. Yun, H.-K. Lee, J.-B. Yoon and E. Yoon, "A Low Voltage Two- Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars", IEEE MEMS 2002 Conference, Las Vegas, USA, pp. 540-543, Jan., 2002.

53.  Y.-S. Choi, J.-B. Yoon, B.-I. Kim, and E. Yoon, "A High-Performance MEMS Transformer for Silicon RF ICs", IEEE International MEMS 2002 Conference, Las Vegas, USA, pp. 653-656, Jan., 2002.

54.  H.-J. Kim, K.-S. Yun, S. Joo, E. Yoon, and J. Kwak, "An Infrared Thin-Layer Spectroelectrochemical Cell with Silicon Micromachining Technique", Analytical Sciences, Vol. 17 Supplement, pp. a81-a83, 2001.

55.  S-W Yoon, E-C Park, C-H Lee, S. Sim, S-G Lee, E. Yoon, J. Laskar, S. Hong, ¡°5~6 GHz-Band GaAs MESFET-Based Cross-Coupled Differential Oscillator MMICs with Low Phase-Noise Performance,¡± IEEE Microwave and Wireless Components Letters, Vol. 11, No. 12, pp. 495-497, Dec., 2001.

56.  J.–H. Kim, B.-G. Kim, J.-B. Yoon and E. Yoon, "A Photosensitive Glass Chip for DNA Purification of Nucleic Acid Probe Assay,¡± Journal of Semiconductor Technology and Science, Vol. 1, No. 4, pp. 103-109, Dec., 2001.

57.  K-H. Lee, H.-K. Lee, H.-J. Byun, I.-J. Cho, J. Bu, and E.Yoon, "An audio frequency filter application of micromachined thermally-isolated diaphragm, structures", Sensors, and Actuators - A - Physical Sensors, Vol. A89, pp. 49-55, 2001.

58.  H.-J. Kim, K.-S. Yun, S. Joo, E. Yoon, and J. Kwak, "An Infrared Thin-Layer Spectroelectrochemical Cell with Silicon Micromachining Technique" The Sixth Asian Conference on Analytical Sciences. Tokyo, Japan, p. 58, Aug., 2001.

59.  Y.-S. Choi, J.-B. Yoon, B.-I. Kim, E. Yoon, and C.-H. Han, "Fabrication of a Solenoid-Type Microwave Transformer". The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, pp. 881-1809, June 2001.

60.  J.-H. Kim, B.-G. Kim, D.-E. Park, K.-S. Yun, J.-B. Yoon and E. Yoon, "A Disposable DNA Purification Chip on Photosensitive Glass Substrate," International Sensor Conference 2001, Seoul, Korea, pp. 133-134, Oct., 2001.

61.  B.-G. Kim, J.-H. Kim, J.-B. Yoon and E. Yoon , "A Passive Micro Mixer in a Two- Way Separated Three-Dimensional Microchannel Formed by Using Polydimethylsiloxane (PDMS) " Proceedings of the International Sensor Conference 2001, Seoul, Korea, pp. 157-158, Oct., 2001.

62.  K.-S. Yun, H.-J. Kim, S. Joo, J. Kwak and E. Yoon, "In situ FTIR Monitoring of Electrochemical Reactions Using a Silicon Micromachined  Infrared Thin-layer Cell" International Sensor Conference 2001, Seoul, Korea, pp. 163-164, Oct., 2001.

63.  J.-H. Kim, B.-G. Kim, E. Yoon and C.-H. Han, "A New Monolithic Micro Biosensor for Blood Analysis". IEEE International MEMS Conference 2001, Interlaken, Switzerland, pp. 443-446, Jan., 2001.

64.  K.-S. Yun, I.-J. Cho, J.-U. Bu, G.-H. Kim, Y.-S. Jeon, C.-J. (CJ) Kim, and E. Yoon, "A Micropump Driven by Continuous Electrowetting Actuation for Low Voltage and Low Power Operations", IEEE International MEMS 2001 Conference, Interlaken, Switzerland, pp.487-490, Jan., 2001.

 

Patents

1.    I.-J. Cho, K.-S. Yun, E. Yoon, "Electromagnetically Actuated Micromirror Actuator and Fabrication Method Thereof", KAIST, U.S. Patent #6,781,732, 2004.

2.    E. Yoon, J.-B. Yoon, H.-K. Lee, J.-H. Kim, "Micromirror Actuator", KAIST, U.S. Patent #6,775,050, 2004.

3.    E. Yoon and K.-S. Yun, ¡°Micropump Driven by Movement of Liquid Drop Induced by Continuous Electrowetting,¡± KAIST, U.S. Patent #6,458,256, 2003.

4.    E.-C. Park, J.-B. Yoon, and E. Yoon, "Sealed-type Remote Pressure-Monitoring Device Method for Fabricating the Same", KAIST, U.S. Patent #6,517,483, 2003.

5.    J.-B. Yoon, C.-H. Han, E. Yoon, C.-H. Kim,"Method for manufaturing a semiconductor device having a metal layer floating over a substrate", KAIST, U.S. Patent #6518165, 2003

6.    E. Yoon, K.-H. Lee, and H.-K. Lee, ¡°Electrothermal Integrator and Audio Frequency Filter,¡± KAIST, U.S. Patent #6,462,614, 2002.

7.    E. Yoon, E.-C. Park, and J.-B. Yoon, ¡°Sealed-type Remote Pressure-Monitoring Device Method for Fabricating the Same,¡± KAIST, U.S. Patent #6,287,256, 2001.

8.    N. Yeung, E. Pak, C.-C. Chao, and E. Yoon, "Apparatus and Method for Determining the Speed of a Semiconductor Chip,¡± Silicon Graphics Inc. U.S. Patent #5,818,250, 1998.

9.    E. Yoon, R. P. Kovacs, and M. E. Thomas "Method of Providing A Dielectric Structure   Semiconductor Devices,¡± National Semiconductor Corporation, U.S. Patent #5,688,724, 1997.

10.E. Yoon, R. Kovacs, and R. Allison "Photolithography Control System and Method Using Latent Image Measurements,¡± National Semiconductor Corporation," U.S. Patent #5,338,630, 1994.

11.E. Yoon, A. Bergemont, and R. Kovacs "Advanced Self-Aligned Stacked Gate EPROM Cells Using Tantalum Oxide Control Gate Dielectric,¡± National Semiconductor Corporation, U.S. Patent #5,304,503, 1994

12.E. Yoon, R. Kovacs, and R. Allison "Phase Contrast Latent Image Metrology Microlithography,¡± National Semiconductor Corporation, U.S. Patent #5,283,141, 1994.